Magnetic sensor, biological cell sensing device, and diagnostic device

ABSTRACT

According to one embodiment, a magnetic sensor includes a first sensor element and a first interconnect. The first sensor element includes a first magnetic layer, a first opposing magnetic layer, and a first nonmagnetic layer provided between the first magnetic layer and the first opposing magnetic layer. A first magnetization of the first magnetic layer is aligned with a first length direction crossing a first stacking direction from the first magnetic layer toward the first opposing magnetic layer. At least a portion of the first interconnect extends along the first length direction. The first interconnect cross direction crosses the first length direction and is from the first sensor element toward the portion of the first interconnect. A first electrical resistance of the first sensor element changes according to an alternating current flowing in the first interconnect and a sensed magnetic field applied to the first sensor element.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2017-055133, filed on Mar. 21, 2017; theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a magnetic sensor, abiological cell sensing device, and a diagnostic device.

BACKGROUND

There is a magnetic sensor that uses a magnetic layer. It is desirableto increase the sensing sensitivity of the magnetic sensor.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A to FIG. 1D are schematic views illustrating a magnetic sensoraccording to a first embodiment;

FIG. 2A and FIG. 2B are graphs illustrating characteristics of themagnetic sensor according to the first embodiment;

FIG. 3A and FIG. 3B are graphs illustrating characteristics of magneticsensors of a reference example;

FIG. 4 is a table illustrating the characteristics of the magneticsensor;

FIG. 5A to FIG. 5C are graphs illustrating characteristics of themagnetic sensor according to the first embodiment;

FIG. 6A to FIG. 6D are schematic views illustrating sense circuits ofmagnetic sensors according to the first embodiment;

FIG. 7A and FIG. 7B are schematic cross-sectional views illustratingother magnetic sensors according to the first embodiment;

FIG. 8A and FIG. 8B are schematic views illustrating another magneticsensor according to the first embodiment

FIG. 9A to FIG. 9D are schematic views illustrating a magnetic sensoraccording to the second embodiment. FIG. 9A is a perspective plan view;

FIG. 10A and FIG. 10B are schematic views illustrating another magneticsensor according to the second embodiment;

FIG. 11A to FIG. 11C are schematic views illustrating another magneticsensor according to the second embodiment;

FIG. 12 is a schematic view illustrating the magnetic sensor and thebiological cell sensing device according to the third embodiment;

FIG. 13 is a schematic view showing the magnetic sensor and thediagnostic device according to the fourth embodiment; and

FIG. 14 is a schematic view showing another magnetic sensor according tothe fourth embodiment.

DETAILED DESCRIPTION

According to one embodiment, a magnetic sensor includes a first sensorelement and a first interconnect. The first sensor element includes afirst magnetic layer, a first opposing magnetic layer, and a firstnonmagnetic layer provided between the first magnetic layer and thefirst opposing magnetic layer. A first magnetization of the firstmagnetic layer is aligned with a first length direction. A firststacking direction from the first magnetic layer toward the firstopposing magnetic layer crosses the first length direction. At least aportion of the first interconnect extends along the first lengthdirection. A first interconnect cross direction crosses the first lengthdirection. The first interconnect cross direction is from the firstsensor element toward the at least a portion of the first interconnect.A first electrical resistance of the first sensor element changesaccording to an alternating current flowing in the first interconnectand a sensed magnetic field applied to the first sensor element.

Various embodiments will be described hereinafter with reference to theaccompanying drawings.

The drawings are schematic and conceptual; and the relationships betweenthe thickness and width of portions, the proportions of sizes amongportions, etc., are not necessarily the same as the actual valuesthereof. Further; the dimensions and proportions may be illustrateddifferently among drawings, even for identical portions.

In the specification and drawings, components similar to those describedor illustrated in a drawing thereinabove are marked with like referencenumerals, and a detailed description is omitted as appropriate.

First Embodiment

FIG. 1A to FIG. 1D are schematic views illustrating a magnetic sensoraccording to a first embodiment. FIG. 1A is a perspective plan view asviewed along arrow AA of FIG. 1B and FIG. 1C. FIG. 1B is a line B1-B2cross-sectional view of FIG. 1A. FIG. 1C is a line A1-A2 cross-sectionalview of FIG. 1A. FIG. 1D is a cross-sectional view of a portion of themagnetic sensor.

As shown in FIG. 1A, the magnetic sensor 110 according to the embodimentincludes a first sensor element 51 and a first interconnect 21. In theexample, the magnetic sensor 110 further includes a first circuit 71, asecond circuit 72, and a third circuit 73. The magnetic sensor 110 andthese circuits may be included in a magnetic sensor device 210.

As shown in FIG. 1D, the first sensor element 51 includes a firstmagnetic layer 11, a first opposing magnetic layer 11 o, and a firstnonmagnetic layer 11 n. The first nonmagnetic layer 11 n is providedbetween the first magnetic layer 11 and the first opposing magneticlayer 11 o.

A first magnetization M1 of the first magnetic layer 11 is aligned witha first length direction DL1.

The first length direction DL1 is taken as an X-axis direction. Onedirection perpendicular to the X-axis direction is taken as a Y-axisdirection. A direction perpendicular to the X-axis direction and theY-axis direction is taken as a Z-axis direction.

A first stacking direction DS1 from the first magnetic layer 11 towardthe first opposing magnetic layer 11 o crosses the first lengthdirection DL1. In the example, the first stacking direction DS1 isaligned with the Z-axis direction.

In the example, the first magnetic layer 11 is provided between a firstelement conductive layer 11 ea and a second element conductive layer 11eb. The first opposing magnetic layer 11 o is provided between the firstmagnetic layer 11 and the second element conductive layer 11 eb. In theexample, the first magnetic layer 11 includes a first film 11 a, asecond film 11 b, a third film 11 e, and a fourth film 11 d. The secondfilm 11 b is positioned between the fourth film 11 d and the firstnonmagnetic layer 11 n. The first film 11 a is positioned between thefourth film 11 d and the second film 11 b. The third film 11 e ispositioned between the first film 11 a and the second film 11 b.

The first film 11 a is, for example, a magnetic film. The first film 11a includes, for example, CoFe, etc. The second film 11 b is a magneticfilm. The second film 11 b includes, for example, CoFe, etc. The thirdfilm 11 c includes, for example, Ru. For example, the third film 11 cgenerates antiferromagnetic coupling. The fourth film 11 d is an antiferromagnetic film. The fourth film 11 d includes, for example, IrMn,etc. A magnetization Ma1 of the first film 11 a is aligned with thefirst length direction DL1. A magnetization Mb1 of the second film 11 bis aligned with the first length direction DL1. The orientation of themagnetization Ma1 is the reverse of the orientation of the magnetizationMb1. The first magnetization M1 of the first magnetic layer 11 issubstantially fixed. The first magnetic layer 11 functions as, forexample, a reference layer.

The length in the first length direction DL1 of the first magnetic layer11 is taken as a first length L1 (referring to FIG. 1B). The length in afirst width direction DW1 of the first magnetic layer 11 is taken as asecond length L2 (referring to FIG. 1C). The first width direction DW1crosses a plane (e.g., the X-Z plane) including the first stackingdirection DS1 and the first length direction DL1. In the example, thefirst width direction DW1 is, for example, the Y-axis direction. Thefirst length L1 is longer than the second length L2. For example, thefirst length L1 is not less than 1.5 times the second length L2. Forexample, shape anisotropy is provided in the first magnetic layer 11.For example, the first magnetization M1 of the first magnetic layer 11is easier to stabilize.

The first magnetization M1 of the first magnetic layer 11 may becontrolled by, for example, the direction of a magnetic field applied inthe film deposition of a film included in the first magnetic layer 11.The first magnetization M1 of the first magnetic layer 11 may becontrolled by, for example, the direction of a magnetic field applied inheat treatment after the film deposition of a film included in the firstmagnetic layer 11.

The first opposing magnetic layer 11 o includes, for example, at leastone selected from the group consisting of CoFe and NiFe. The orientationof a magnetization Mo1 of the first opposing magnetic layer 11 o changesaccording to the magnetic field applied to the first opposing magneticlayer 11 o, etc. The first opposing magnetic layer 11 o is, for example,a free layer.

The first nonmagnetic layer 11 n includes, for example, Cu, etc.

In the example, the planar configurations (the configurations in a planealigned with the X-Y plane) of the first opposing magnetic layer 11 oand the first nonmagnetic layer 11 n are the same as the planarconfiguration of the first magnetic layer 11.

The first element conductive layer 11 ea includes, for example, at leastone selected from the group consisting of Ta, Cu, and Ru. The firstelement conductive layer 11 ea may include, for example, NiFeCr. Thefirst element conductive layer 11 ea may function as, for example, abuffer layer.

The second element conductive layer 11 eb includes, for example, atleast one selected from the group consisting of Ru and Ta. The secondelement conductive layer 11 eb may function as, for example, a cappinglayer.

The first magnetic layer 11, the first opposing magnetic layer 11 o, andthe first nonmagnetic layer 11 n are included in a first stacked portionS1. The first element conductive layer 11 ea and the second elementconductive layer 11 eb may be included in the first stacked portion S1.The first element conductive layer 11 ea and the second elementconductive layer 11 eb are not illustrated in FIG. 1B and FIG. 1C. Asshown in FIG. 1B, the first stacked portion S1 includes one end portionS1 a and another end portion S1 b. The direction from the one endportion S1 a toward the other end portion S1 b is aligned with the firstlength direction DL1. In the example, the first stacked portion S1 is,for example, a GMR (Giant Magneto Resistive effect) element.

As shown in FIG. 1A and FIG. 1B, at least a portion of the firstinterconnect 21 extends along the first length direction DL1. As shownin FIG. 1B, the direction (a first interconnect cross direction DC1)from the first sensor element 51 toward the at least a portion of thefirst interconnect 21 recited above crosses the first length directionDL1. In the example, the first interconnect cross direction DC1 is theZ-axis direction. In the example, the first interconnect cross directionDC1 is aligned with the first stacking direction DS1.

As shown in FIG. 1B and FIG. 1C, a substrate 10 s is provided in theexample. The first sensor element 51 is positioned between the substrate10 s and the first interconnect 21. The substrate 10 s is notillustrated in FIG. 1A.

As described below, a first electrical resistance of the first sensorelement 51 changes according to an alternate current flowing in thefirst interconnect 21 and a sensed magnetic field (a signal magneticfield Hsig applied from the outside) applied to the first sensor element51.

For example, as shown in FIG. 1B, a first sensor one-end interconnect 51e is electrically connected to the one end portion S1 a of the firststacked portion S1. On the other hand, a first sensor other-endinterconnect 51 f is electrically connected to the other end portion S1b of the first stacked portion S1. The change of the first electricalresistance of the first sensor element 51 corresponds to the change ofthe electrical resistance between the one end portion S1 a and the otherend portion S1 b. The change of the first electrical resistancecorresponds to the change of the electrical resistance between the firstsensor one-end interconnect 51 e and the first sensor other-endinterconnect 51 f. The first sensor one-end interconnect 51 e and thefirst sensor other-end interconnect 51 f may be electrode terminals.

The first circuit 71 is electrically connected to the first sensorelement 51. In the example, the first circuit 71 is electricallyconnected to the first sensor element 51 via an interconnect 71 a and aninterconnect 71 b. The first circuit 71 supplies a first direct currentCs1 to the first sensor element 51 (referring to FIG. 1B).

In the example, the first current Cs1 flows through the first stackedportion S1 along the first length direction DL1.

The third circuit 73 senses the change of the first electricalresistance of the first sensor element 51. For example, the thirdcircuit 73 is connected in parallel with the first circuit 71. Forexample, the third circuit 73 is electrically connected to the firststacked portion S1 via the interconnect 71 a and the interconnect 71 b.The third circuit 73 senses at least one of a voltage, a current, or aresistance corresponding to the first electrical resistance of the firstsensor element 51.

As shown in FIG. 1A, the second circuit 72 is electrically connected tothe first interconnect 21. In the example, the second circuit 72 iselectrically connected to one end 21 e of the first interconnect 21 byan interconnect 72 a. The second circuit 72 is electrically connected toanother end 21 f of the first interconnect 21 by an interconnect 72 b.The second circuit 72 supplies a second current Ch1 to the firstinterconnect 21. As described below, the second current Ch1 is, forexample, an alternating current signal. A magnetic field H2 is generatedby the second current Ch1 flowing through the first interconnect 21. Themagnetic field H2 is applied to the first sensor element 51.

In the case where a distance d1 between the first sensor element 51 andthe first interconnect 21 (referring to FIG. 1B and FIG. 1C) is small,for example, the magnetic field H2 that is generated by the currentflowing in the first interconnect 21 is applied effectively to the firstsensor element 51. In the case where the distance d1 is excessivelysmall, the current (the direct current) that is supplied to the firstsensor element 51 may be affected by effects of capacitive coupling whenthe alternating current signal is supplied to the first interconnect 21.For example, the distance d1 is not less than 0.1 μm and not more than120 μm. By setting the distance d1 to be 120 μm or less, the magneticfield H2 is applied effectively to the first sensor element 51. Theeffects of the capacitive coupling are suppressed when the distance d1is 0.1 μm or more. It is more favorable for the distance d1 to be, forexample, 0.5 μm or more. It is more favorable for the distance d1 to be,for example, 1 μm or more. It is more favorable for the distance d1 tobe 30 μm or less. It is more favorable for the distance d1 to be 15 μmor less.

For example, the width (the second length L2) of the first magneticlayer 11 is 1 μm; and the distance d1 between the first interconnect 21and the first sensor element 51 is set to 1 μm. The current that flowsin the first interconnect 21 is set to 1 mA. In such a case, themagnetic field H2 that is applied to the first sensor element 51 is 1000A/m (i.e., 12.5 Oe (oersteds)). The direction of the magnetic field H2is aligned with the Y-axis direction. As described below, the sensedmagnetic field is sensed by using an alternating current magnetic fieldH2 having a Y-axis direction component.

For example, in the case where the current (the second current Ch1) thatflows in the first interconnect 21 is zero, the orientation of themagnetization Mo1 of the first opposing magnetic layer 11 o is alignedwith the X-axis direction. In the case where the current (the secondcurrent Ch1) that flows in the first interconnect 21 is nonzero, forexample, the orientation of the magnetization Mo1 of the first opposingmagnetic layer 11 o changes due to the magnetic field H2 generated bythe current. For example, the orientation of the magnetization Mo1changes toward the Y-axis direction. As a result, the angle changesbetween the first magnetization H1 of the first magnetic layer 11 andthe magnetization Mo1 of the first opposing magnetic layer 11 o.Thereby, the electrical resistance (the first electrical resistance)changes between the first magnetic layer 11 and the first opposingmagnetic layer 11 o.

Further, the orientation of the magnetization Mo1 of the first opposingmagnetic layer 11 o changes when the sensed magnetic field (the signalmagnetic field Hsig) to be sensed is applied to the first sensor element51. As a result, the angle changes between the first magnetization M1 ofthe first magnetic layer 11 and the magnetization Mo1 of the firstopposing magnetic layer 11 o. Thereby, the electrical resistance (thefirst electrical resistance) between the first magnetic layer 11 and thefirst opposing magnetic layer 11 o changes.

Thus, in the embodiment, the first electrical resistance of the firstsensor element 51 changes according to the second current Ch1 flowing inthe first interconnect 21 and the sensed magnetic field (the signalmagnetic field Hsig) applied to the first sensor element 51.

High-sensitivity is obtained in such a magnetic sensor 110. Examples ofthe characteristics of the magnetic sensor 110 will now be described.

FIG. 2A and FIG. 2B are graphs illustrating characteristics of themagnetic sensor according to the first embodiment.

These figures illustrate simulation results of the characteristics ofthe magnetic sensor 110. In the example, the width (the second lengthL2) of the first magnetic layer 11 is 10 μm; and the length (the firstlength L1) of the first magnetic layer 11 is 250 μm. The distance d1between the first interconnect 21 and the first sensor element 51 is 0.5μm. The horizontal axis of FIG. 2A is the second current Ch1 flowing inthe first interconnect 21. The horizontal axis of FIG. 2B is a magneticfield H (Oe) (corresponding to the magnetic field H2) generated by thesecond current Ch1. In these figures, the vertical axis is a firstelectrical resistance R1.

As shown in FIG. 2A, the first electrical resistance R1 is substantiallysymmetric with respect to the positive and negative second current Ch1.

For example, the first electrical resistance R1 increases when thecurrent (the second current Ch1) flowing in the first interconnect 21has a positive polarity and the absolute value of the current increases.The first electrical resistance R1 increases when the current (thesecond current Ch1) flowing in the first interconnect 21 has a negativepolarity and the absolute value of the current increases. The firstelectrical resistance R1 has substantially a minimum when the secondcurrent Ch1 is 0.

For example, the difference is small between the first electricalresistance R1 (Rp) when the second current Ch1 having the positivepolarity is a first absolute value Av1 and the first electricalresistance R1 (Rn) when the second current Ch1 having the negativepolarity is the first absolute value Av1. For example, the ratio(|Rp−Rn|/Rp), which is the absolute value of the difference between thefirst electrical resistance R1 when the second current Ch1 having thepositive polarity is the first absolute value Av1 and the firstelectrical resistance R1 when the second current Ch1 having the negativepolarity is the first absolute value Av1 to the first electricalresistance R1 when the second current Ch1 having the positive polarityis the first absolute value Av1, is about 0.03 or less. The ratio may be0.01 or less.

For example, when the current (the second current Ch1) does not flow inthe first interconnect 21, the first electrical resistance R1 of thefirst sensor element 51 has substantially a minimum. The value of theminimum of the first electrical resistance R1 obtained when changing thesecond current Ch1 is taken as a minimum value Rmin. For example, whenthe second current Ch1 is 0, the first electrical resistance R1 is morethan 1 times and not more than 1.002 times the minimum value Rmin. Forexample, when the second current Ch1 is 0, the first electricalresistance R1 may be more than 1 times and not more than 1.001 times theminimum value Rmin.

As shown in FIG. 2B, the first electrical resistance R1 is substantiallysymmetric with respect to the positive and negative magnetic field H.Thus, in the magnetic sensor 110, a resistance-magnetic fieldcharacteristic (R-H characteristic) that is an even function is obtainedin which the increased resistance is symmetric with respect to thepositive and negative magnetic field. The magnetic field (a saturationmagnetic field Hs) at which the increase of the first electricalresistance R1 is saturated is about 30 Oe. Hysteresis Hc is about 0.15Oe. The hysteresis Hc is very small. The noise can be small because thehysteresis Hc is small. According to the embodiment, a magnetic sensorcan be provided in which the sensitivity can be increased.

FIG. 3A and FIG. 3B are graphs illustrating characteristics of magneticsensors of a reference example. FIG. 3A shows an example of the R-Hcharacteristic of a magnetic sensor 119 a of the reference example. In amagnetic sensor 119 b, a granular TMR configuration is used. An R-Hcharacteristic that is an even function is obtained in the referenceexample. However, the saturation magnetic field Hs is about 3 kOe and isextremely large. The change amount of a resistance R due to the magneticfield H is small.

FIG. 3B shows an example of the R-H characteristic of a magnetic sensor119 b of the reference example. In the magnetic sensor 119 b, a freelayer/nonmagnetic intermediate layer/free layer configuration is used.An R-H characteristic that is an even function is obtained in thereference example. However, the hysteresis Hc is large. For example, thehysteresis Hc is about 15 Oe when the saturation magnetic field Hs isabout 30 Oe.

FIG. 4 is a table illustrating the characteristics of the magneticsensor.

FIG. 4 shows the hysteresis Hc and the saturation magnetic field Hs forstacked bodies having various configurations. The first stacked portionS1 of the samples includes the first magnetic layer 11, the firstopposing magnetic layer 11 o, and the first nonmagnetic layer 11 n. Thelength (the first length L1) of the first magnetic layer 1 and the width(the second length L2) of the first magnetic layer 11 are modified. Inthe example, the first interconnect 21 is not provided in the samples.An external magnetic field is applied to the samples; and the R-Hcharacteristic at that time is measured. An orientation DM1 of the firstmagnetization M1 of the first magnetic layer 11 is modified for thevarious configurations (referring to FIGS. 1A to 1D). Also, a directionD21 in which the first interconnect 21 extends is modified (referring toFIG. 1A). The direction D21 corresponds to the direction of the secondcurrent Ch1 flowing through the first interconnect 21. An externalmagnetic field that is in a direction along the film surface andorthogonal to the direction D21 is applied to the first stacked portionS1. The values of the hysteresis Hc and the saturation magnetic field Hsshown in FIG. 4 are determined from the R-H characteristic when analternating-current magnetic field of 25 Oe is applied.

In configurations SP11 to SP15, the hysteresis Hc is 0.25 Oe or less. Inthe configurations SP21 to SP24, SP31 to SP34, and SP41 to SP44, thehysteresis Hc is 1 Oe or more and is large.

Thus, a small hysteresis Hc is obtained when the orientation DM1 of thefirst magnetization M1 of the first magnetic layer 11 and the directionD21 in which the first interconnect 21 extends are aligned with theX-axis direction (the first length direction DL1). In such aconfiguration, the noise can be small; and high sensing sensitivity isobtained.

For example, a Cu film having a thickness of not less than 2.5 nm andnot more than 3.5 nm is used as the first nonmagnetic layer 11 n. Insuch a first nonmagnetic layer 11 n, the negative effects on thesaturation magnetic field Hs are small. By using such a firstnonmagnetic layer 11 n, for example, a coupling magnetic field can beinduced between the first opposing magnetic layer 11 o and the firstmagnetic layer 11. Thereby, for example, a small hysteresis Hc can beobtained while the first opposing magnetic layer 11 o is a singlemagnetic domain. For example, there is a configuration in which a hardmagnetic film is provided at the vicinity of the first opposing magneticlayer 11 o to obtain a small hysteresis Hc using the first opposingmagnetic layer 11 o that is the single magnetic domain. In such a case,the processes are complex. By using a first nonmagnetic layer 11 n suchas that recited above, a small hysteresis Hc is obtained without usingcomplex processes.

An operation example of the magnetic sensor 110 will now be described.In the following example, the second current Ch1 that is alternatingcurrent flows in the first interconnect 21. In other words, the secondcircuit 72 supplies the second current Ch1 which is alternating currentto the first interconnect 21. The second current Ch1 has an alternatingcurrent component. An alternating-current magnetic field Hac isgenerated by the alternating current component. The direction of thealternating-current magnetic field Hac is aligned with the Y-axisdirection. The alternating-current magnetic field Hac and the sensedmagnetic field (the signal magnetic field Hsig) to be sensed are appliedto the first sensor element 51.

FIG. 5A to FIG. 5C are graphs illustrating characteristics of themagnetic sensor according to the first embodiment.

FIG. 5A shows characteristics when the signal magnetic field Hsig is 0.FIG. 5B shows characteristics when the signal magnetic field Hsig ispositive. FIG. 5C shows characteristics when the signal magnetic fieldHsig is negative. These figures show the relationship between themagnetic field H and the resistance R (corresponding to the firstelectrical resistance R1).

As shown in FIG. 5A, when the signal magnetic field Hsig is 0, theresistance R has a characteristic that is symmetric with respect to thepositive and negative magnetic field H. When the alternating current iszero, the resistance R is a low resistance Ro. The magnetization of thefirst opposing magnetic layer 11 o (e.g., a free layer) rotatessubstantially identically to the positive and negative magnetic field H.Therefore, symmetric increased resistance characteristics are obtained.The fluctuation of the resistance R with respect to the alternatingcurrent (the alternating-current magnetic field Hac) has the same valuebetween the positive and negative polarities. The period of the changeof the resistance R is 2 times the period of the alternating-currentmagnetic field Hac. The change of the resistance R substantially doesnot include the frequency component of the alternating-current magneticfield Hac.

As shown in FIG. 5B, the characteristic of the resistance R shifts tothe positive magnetic field H side when a positive signal magnetic fieldHsig is applied. The resistance R becomes large for thealternating-current magnetic field Hac on the positive side. Theresistance R becomes small for the alternating-current magnetic fieldHac on the negative side.

As shown in FIG. 5C, the characteristic of the resistance R shifts tothe negative magnetic field H side when a negative signal magnetic fieldHsig is applied. The resistance R becomes small for thealternating-current magnetic field Hac on the positive side. Theresistance R becomes large for the alternating-current magnetic fieldHac on the negative side.

Resistances R having mutually-different fluctuation occur for thepositive and negative alternating-current magnetic field Hac when asignal magnetic field Hsig is applied. The period of the fluctuation ofthe resistance R with respect to the positive and negativealternating-current magnetic field Hac is the same as the period of thealternating-current magnetic field Hac (the period of the alternatingcurrent component of the second current Ch1). An output voltage that hasan alternating current frequency component corresponding to the signalmagnetic field Hsig is generated.

The characteristics recited above are obtained in the case where thesignal magnetic field Hsig does not change temporally. The case wherethe signal magnetic field Hsig changes temporally is as follows. Thefrequency of the signal magnetic field Hsig is taken as a signalfrequency fsig. The frequency of the alternating-current magnetic fieldHac is taken as an alternating current frequency fac. In such a case, anoutput that corresponds to the signal magnetic field Hsig at frequenciesof fac±fsig is generated.

In the case where the signal magnetic field Hsig changes temporally, thesignal frequency fsig is, for example, 1 kHz or less. On the other hand,the alternating current frequency fac is sufficiently higher than thesignal frequency fsig. For example, the alternating current frequencyfac is not less than 10 times the signal frequency fsig.

For example, there is an application in which the magnetic fieldgenerated from a living body is sensed using the magnetic sensor 110. Inthe case where such a biological magnetic field (e.g., neuromagnetism,cardiomagnetism, a neuron, or the like) is sensed, the signal frequencyfsig is 1 kHz or less. In such a case, the alternating current frequencyfac is, for example, 100 kHz or more.

In the magnetic sensor 110 according to the embodiment, the sensedmagnetic field (the signal magnetic field Hsig) that is to be sensed canbe sensed with high sensitivity using such characteristics. An exampleof the sensing will now be described.

FIG. 6A to FIG. 6D are schematic views illustrating sense circuits ofmagnetic sensors according to the first embodiment.

A frequency generator 72G is provided in a magnetic sensor 110A and amagnetic sensor device 210A shown in FIG. 6A. The frequency generator72G generates a signal having the alternating current frequency fac (afirst frequency). This signal is supplied to the second circuit 72. Thesecond circuit 72 supplies, to the first interconnect 21, the secondcurrent Ch1 having the alternating current frequency fac (the firstfrequency).

On the other hand, a direct current (the first current Cs1) is suppliedby the first circuit 71 to the first sensor element 51.

In the example, the third circuit 73 includes a lock-in amplifier 73 a.The signal that is generated by the frequency generator 72G and has thealternating current frequency fac (the first frequency) is input to thelock-in amplifier 73 a. For example, the lock-in amplifier 73 a sensesan alternating current signal having a frequency in a range includingthe first frequency (the alternating current frequency fac). In theexample, the output of the lock-in amplifier 73 a is output as an outputsignal SO1 via a low-pass filter 73 b. Thereby, the output signal SO1 isa signal corresponding to the signal magnetic field Hsig.

A band-pass filter 73 c and a PSD (phase sensitive detector) circuit 73d are provided in a magnetic sensor HOB and a magnetic sensor device210B shown in FIG. 6B. A signal that corresponds to the first electricalresistance R1 is input to the band-pass filter 73 c. For example, theband-pass filter 73 c attenuates signals of frequencies not less than 2times the first frequency (the alternating current frequency fac). Theoutput of the band-pass filter 73 c is input to the PSD circuit 73 d. Inthe example, the output of the band-pass filter 73 c is input to anamplifier 73 e; and the output of the amplifier 73 e is input to the PSDcircuit 73 d. The signal that is generated by the frequency generator72G and has the alternating current frequency fac (the first frequency)is input to the PSD circuit 73 d.

For example, the highest frequency of the signal magnetic field Hsig istaken as a maximum frequency fsigm. In such a case, for example, theband-pass filter 73 c transmits frequencies in the range of fac±fsigm.Also, the band-pass filter 73 c attenuates (e.g., cuts) frequencycomponents that are 2 times the alternating current frequency fac ormore.

In such a case as well, the output of the PSD circuit 73 d is output asthe output signal SO1 via the low-pass filter 73 b. Thereby, the outputsignal SO1 is a signal corresponding to the signal magnetic field Hsig.

A first sensor portion SU1 and a second sensor portion SU2 are providedin a magnetic sensor 110C and a magnetic sensor device 210C shown inFIG. 6C. The first sensor portion SU1 includes the first sensor element51, the first interconnect 21, the first circuit 71, the second circuit72, and the third circuit 73 recited above. The second sensor portionSU2 includes a stacked body 51X, an interconnect 21X, another firstcircuit 71X, another second circuit 72X, and another third circuit 73X.The first circuit 71 and the second circuit 72 may be shared by thefirst sensor portion SU1 and the second sensor portion SU2. In such acase, the other first circuit 71X and the other second circuit 72X areomitted. Hereinbelow, the case is described where the other firstcircuit 71X and the other second circuit 72X are provided.

In the second sensor portion SU2 as shown in FIG. 6D, the stacked body51X includes a nonmagnetic layer 11 nX and two magnetic layers (amagnetic layer 11X and a magnetic layer 11 oX). The nonmagnetic layer 11nX is provided between the two magnetic layers 11X and 11 oX. A firststacked body one-end interconnect 51 eX is electrically connected to oneend of the stacked body 51X. A first stacked body other-end interconnect51 fX is electrically connected to the other end of the stacked body51X.

The configuration of the stacked body 51X is similar to, for example,the configuration of the first sensor element 51. The configuration ofthe interconnect 21X is similar to, for example, the configuration ofthe first interconnect 21. The configuration of the other first circuit71X is similar to, for example, the configuration of the first circuit71. The configuration of the other second circuit 72X is similar to, forexample, the configuration of the second circuit 72. The configurationof the other third circuit 73X is similar to, for example, theconfiguration of the third circuit 73. For example, the characteristicsof the second sensor portion SU2 are substantially the same as thecharacteristics of the first sensor portion SU1.

The spatial position of the second sensor portion SU2 is different fromthe spatial position of the first sensor portion SU1. For example, thestrength of the sensed magnetic field (the signal magnetic field Hsig)applied to the second sensor portion SU2 (the stacked body 51X) issmaller than the strength of the sensed magnetic field applied to thefirst sensor portion SU1 (the first sensor element 51).

For example, a current that includes the same signal as the signalsupplied to the first sensor element 51 from the first circuit 71 issupplied to the stacked body 51X from the other first circuit 71X. Forexample, a current that includes the same signal as the signal suppliedto the first interconnect 21 from the second circuit 72 is supplied tothe interconnect 21X from the other second circuit 72X.

The signal obtained from the second sensor portion SU2 (e.g., the outputof the other third circuit 73X) and the signal obtained from the firstsensor portion SU1 are supplied to a sense circuit 73A. The sensecircuit 73A outputs a signal corresponding to the difference of thesetwo signals. In the example, the sense circuit 73A includes adifferential amplifier 73D. The signal obtained from the second sensorportion SU2 and the signal obtained from the first sensor portion SU1are input to the differential amplifier 73D. The differential amplifier73D outputs a signal corresponding to the difference of these signals.The sense circuit 73A may be considered to be a portion of the thirdcircuit 73 of the first sensor portion SU1.

By using such a configuration, for example, the sensed magnetic field(the signal magnetic field Hsig) that is to be sensed can be sensed withhigh sensitivity.

For example, there are cases where noise is generated by an externalmagnetic field that is different from the signal magnetic field Hsig.The effects of such noise can be reduced by a configuration includingthe stacked body 51X, the interconnect 21X, and the differentialamplifier 73D recited above.

The external magnetic field that is the noise source can be consideredto be uniform inside a space having a size of not less than 1 mm and notmore than 10 cm. The distance between the second sensor portion SU2 andthe first sensor portion SU1 is, for example, not less than 1 mm and notmore than 10 cm. Thereby, the external magnetic field that is the noisesource can be attenuated effectively.

For example, there are also cases where noise is generated by a staticexternal magnetic field such as geomagnetic field. For example, acurrent (a compensation current) that has a component that attenuatesthe external magnetic field may be supplied to the first interconnect21. For example, the second current Ch1 may include an alternatingcurrent component and a compensation component. Thereby, the effects ofthe noise due to the external magnetic field can be reduced. The effectsof geomagnetic field can be compensated by direct current.

In the embodiment, the noise can be reduced. Thereby, high sensitivityis obtained practically. For example, a micro signal magnetic field Hsigcan be sensed with low noise and high sensitivity. In the embodiment,for example, the distortion of the signal magnetic field Hsig is small;and a R-H characteristic that has a small hysteresis Hc and is an evenfunction is obtained. In the embodiment, a hysteresis Hc that is smallerthan the hysteresis Hc of a conventional linear-response R-Hcharacteristic is obtained.

Several examples of the first sensor element 51 will now be described.

FIG. 7A and FIG. 7B are schematic cross-sectional views illustratingother magnetic sensors according to the first embodiment.

These drawings show other examples of the first sensor element 51.

In a magnetic sensor 111 as shown in FIG. 7A, the first sensor element51 further includes another first magnetic layer 11A and another firstnonmagnetic layer 11 nA in addition to the first magnetic layer 11, thefirst opposing magnetic layer 11 o, and the first nonmagnetic layer 11n. The configurations of the first magnetic layer 11, the first opposingmagnetic layer 11 o, and the first nonmagnetic layer 11 n are similar tothe respective configurations described above.

The first opposing magnetic layer 11 o is positioned between the firstmagnetic layer 11 and the other first magnetic layer 11A in the firststacking direction DS1 (e.g., the Z-axis direction). The other firstnonmagnetic layer 11 nA is positioned between the other first magneticlayer 11A and the first opposing magnetic layer 11 o in the firststacking direction DS1.

In the example, the first magnetic layer 11 and the other first magneticlayer 11A are provided between the first element conductive layer 11 eaand the second element conductive layer 11 eb.

In the example, the other first magnetic layer 11A includes anotherfirst film 11 aA, another second film 11 bA, another third film 11 cA,and another fourth film 11 dA. The other second film 11 bA is positionedbetween the other fourth film 11 dA and the other first nonmagneticlayer 11 nA. The other first film 11 aA is positioned between the otherfourth film 11 dA and the other second film 11 bA. The other third film11 cA is positioned between the other first film 11 aA and the othersecond film 11 bA.

The configurations and materials of the first film 11 a, the second film11 b, the third film 11 e, and the fourth film 11 d are appliedrespectively to the other first film 11 aA, the other second film 11 bA,the other third film 11 cA, and the other fourth film 11 dA.

In the magnetic sensor 111, the position of the first opposing magneticlayer 11 o (e.g., the free layer) in the first sensor element 51 ispositioned at substantially the central portion of the first sensorelement 51. Thereby, for example, the magnetic field that is caused by aself-current flowing through the first sensor element 51 (in the firstlength direction DL1 in X-Y plane) can be substantially zero. Thereby,an R-H characteristic showing even function without distortion by theself-current is obtained. The resistance change ratio of the magneticsensor 111 can be higher than the resistance change ratio of themagnetic sensor 110 illustrated in FIG. 1B. For example, the resistancechange ratio of the magnetic sensor 111 is about 1.5 times theresistance change ratio of the magnetic sensor 110.

In the example of the magnetic sensor 111, the first nonmagnetic layer11 n includes, for example, MgO. The first nonmagnetic layer 11 nincludes, for example, an insulative material.

In the magnetic sensor 111, the first element conductive layer 11 eb iselectrically connected to the first sensor one-end interconnect 51 e.The first sensor one-end interconnect 51 e is connected to the firstcircuit 71 via the interconnect 71 a. The second element conductivelayer 11 ebA is electrically connected to the first sensor other-endinterconnect 51 f. The first sensor other-end interconnect 51 f isconnected to the first circuit 71 via the interconnect 71 b. The firstcurrent Cs1 flows through the first stacked portion S1 along the firststacking direction DS1 (the Z-axis direction).

In a magnetic sensor 112 as shown in FIG. 7B, the first sensor element51 further includes the other first magnetic layer 11A in addition tothe first magnetic layer 1, the first opposing magnetic layer 11 o, andthe first nonmagnetic layer 11 n.

In the example, the first opposing magnetic layer 11 o includes a firstpartial region 11 oa and a second partial region 11 ob. A portion of thefirst nonmagnetic layer 11 n is positioned between the first magneticlayer 11 and the first partial region 11 ea. Another portion of thefirst nonmagnetic layer 11 n is positioned between the other firstmagnetic layer 11A and the second partial region 11 ob.

In the example, the first partial region 11 oa is provided between thefirst sensor one-end interconnect 51 e and a portion of the firstelement conductive layer 11 ea. The second element conductive layer, 11eb is provided between the first sensor one-end interconnect 51 e andthe first partial region 11 oa. The first magnetic layer 11 and aportion of the first nonmagnetic layer 11 n are provided between thefirst partial region 11 oa and the second element conductive layer 11eb. The first partial region 11 oa, the first magnetic layer 11, and theportion of the first nonmagnetic layer 11 n are included in the firststacked portion S1.

The second partial region 11 ob is provided between the first sensorother-end interconnect 51 f and another portion of the first elementconductive layer 11 ea. Another second element conductive layer 11 ebAis provided between the first sensor other-end interconnect 51 f and thesecond partial region 11 ob. The other first magnetic layer 11A andanother portion of the first nonmagnetic layer 11 n are provided betweenthe second partial region 11 ob and the other second element conductivelayer 11 ebA. The second partial region 11 ob, the other first magneticlayer 11A, and the other portion of the first nonmagnetic layer 11 n areincluded in another first stacked portion S1A.

In the example of the magnetic sensor 112, the first nonmagnetic layer11 n includes, for example, MgO. The first nonmagnetic layer 11 nincludes, for example, an insulative material.

The first current Cs1 flows through a current path between the firstsensor one-end interconnect 51 e and the first sensor other-endinterconnect 51 f. The current path includes the second elementconductive layer 11 eb, the first magnetic layer 11, the portion of thefirst nonmagnetic layer 11 n, the first partial region 11 oa, the secondpartial region 11 ob, the other portion of the first nonmagnetic layer11 n, the other first magnetic layer 11A, and the other second elementconductive layer 11 ebA.

In other words, the first electrical resistance R1 includes theelectrical resistance of a current flowing through the first magneticlayer 11, the first opposing magnetic layer 11 o, and the other firstmagnetic layer 11A. For example, the first electrical resistance R1includes an electrical resistance of a current flowing from the firstmagnetic layer 11 to the other first magnetic layer 11A by way of thefirst opposing magnetic layer 11 o.

For example, the portion where the first partial region 11 oa and thefirst magnetic layer 11 are stacked is used as one current conductionportion. The portion where the second partial region 11 ob and the otherfirst magnetic layer 11A are stacked is used as one current conductionportion. These current conduction portions are connected in series. Thenumber of multiple current conduction portions may be three or more.

In such a configuration, the noise can be reduced further. In such aconfiguration, for example, the volume (the surface area) of the firstopposing magnetic layer 11 o can be increased. Thereby, the noise can bereduced.

In the magnetic sensors 111 and 112, the first stacked portion S1 is,for example, a TMR (Tunnel Magneto Resistance Effect) element.

FIG. 8A and FIG. 8B are schematic views illustrating another magneticsensor according to the first embodiment.

FIG. 8A is a perspective plan view as viewed along arrow AA of FIG. 8B.FIG. 8B is a line A1-A2 cross-sectional view of FIG. 8A. The substrate10 s is not illustrated in FIG. 8A.

In the other magnetic sensor 113 according to the embodiment as shown inFIG. 8A and FIG. 8B, the first sensor element 51 further includes afirst magnetic portion 61 and a second magnetic portion 62 in additionto the first magnetic layer 11, the first opposing magnetic layer 11 o,the first nonmagnetic layer 11 n, and the first interconnect 21.

The first opposing magnetic layer 11 o (e.g., the free layer) ispositioned between the first magnetic portion 61 and the second magneticportion 62 in a direction (e.g., the Y-axis direction) crossing a plane(the X-Z plane) including the first stacking direction DS1 (e.g., theZ-axis direction) and the first length direction DL1 (e.g., the X-axisdirection).

A thickness t61 along the first stacking direction DS1 (e.g., the Z-axisdirection) of the first magnetic portion 61 is thicker than a thicknesst11 o along the first stacking direction DS1 of the first opposingmagnetic layer 11 o. A thickness t62 along the first stacking directionDS1 of the second magnetic portion 62 is thicker than the thickness t11o.

The first magnetic portion 61 and the second magnetic portion 62include, for example, NiFe, etc. The first magnetic portion 61 and thesecond magnetic portion 62 include, for example, a material having ahigh permeability. The first magnetic portion 61 and the second magneticportion 62 include, for example, a soft magnetic material. For example,the signal flux converges easily in the first opposing magnetic layer 11o of the first sensor element 51 due to the high permeability. The firstmagnetic portion 61 and the second magnetic portion 62 function as, forexample, MFCs (Magnetic Flux Concentrators). In a NiFe-based alloy, thepermeability is greater than 1000.

The thickness t61 of the first magnetic portion 61 and the thickness t62of the second magnetic portion 62 each are, for example, not less than0.1 μm and not more than 10 μm.

As shown in FIG. 8A, the distance between the first magnetic portion 61and the first opposing magnetic layer 11 o is taken as a gap g1. Thewidth (the length in the first width direction DW1) of the firstopposing magnetic layer 11 o is the same as the length (the secondlength L2) in the first width direction DW1 of the first magnetic layer11. The length in the first width direction DW1 of the first magneticportion 61 is taken as a length d61. The length in the first widthdirection DW1 of the second magnetic portion 62 is taken as a lengthd62. The length d62 is the same as the length d61.

In such a case, an amplification factor G of the signal magnetic fieldHsig applied to the first opposing magnetic layer 11 o has thepermeabilities of the first magnetic portion 61 and the second magneticportion 62 as an upper limit and is represented substantially by thefollowing first formula.G=0.6×(d61)/(L2+2×g1)  (1)

For example, the amplification factor G is about 300 when the secondlength L2 is 1 μm, the gap g1 is 3 nm, and the length d61 is 0.5 mm. Inother words, the sensitivity can be improved to 300 times.

The resolution of the sensing of the signal magnetic field Hsig isdependent on the sizes of the first magnetic portion 61 and the secondmagnetic portion 62 (i.e., 2×d61). For example, in a sensor for amagnetocardiograph or a magnetoencephalograph, the cell populationactivity is sensed using a resolution in the range of not less than 0.1mm and not more than 5 mm. For example, in such an application, anextremely high sensitivity is obtained by using the first magneticportion 61 and the second magnetic portion 62 recited above.

For example, in the granular TMR element of the reference example, thelarge saturation magnetic field Hs (e.g., 1 kOe to 10 kOe) that isunique to the element can be reduced to about 50 Oe or less by using theMFC. Conversely, in the embodiment, the saturation magnetic field Hs canbe reduced to about 0.1 Oe by using the MFC. As a result, highsensitivity that is at least 100 times that of the granular TMR elementof the reference example is obtained. According to the embodiment, forexample, the sensing of a micro magnetic field of about 1 picotesia (pT)is possible. According to the embodiment, for example, neuromagnetism orcardiomagnetism can be sensed with high sensitivity.

Second Embodiment

Multiple sensor elements are provided in a second embodiment.

FIG. 9A to FIG. 9D are schematic views illustrating a magnetic sensoraccording to the second embodiment. FIG. 9A is a perspective plan view.FIG. 9B is a cross-sectional view illustrating a portion of the magneticsensor 121.

As shown in FIG. 9A, multiple first sensor elements 51 are provided inthe magnetic sensor 121 according to the second embodiment. The multiplefirst sensor elements 51 include sensor elements 51A to 51D.

The sensor element 51A (the first sensor element 51) includes the firstmagnetic layer 11, the first opposing magnetic layer 11 o, and the firstnonmagnetic layer 11 n. Examples of the first magnetic layer 11, thefirst opposing magnetic layer 11 o, and the first nonmagnetic layer 11 nare as described above.

As shown in FIG. 9B, the sensor element 51B includes a second magneticlayer 12, a second opposing magnetic layer 12 o, and a secondnonmagnetic layer 12 n provided between the second magnetic layer 12 andthe second opposing magnetic layer 12 o. The second magnetic layer 12,the second opposing magnetic layer 12 o, and the second nonmagneticlayer 12 n are included in a second stacked portion S2.

As shown in FIG. 9C, the sensor element 51C includes a third magneticlayer 13, a third opposing magnetic layer 13 o, and a third nonmagneticlayer 13 n provided between the third magnetic layer 13 and the thirdopposing magnetic layer 13 o. The third magnetic layer 13, the thirdopposing magnetic layer 13 o, and the third nonmagnetic layer 13 n areincluded in a third stacked portion S3.

As shown in FIG. 9D, the sensor element 51D includes a fourth magneticlayer 14, a fourth opposing magnetic layer 14 o, and a fourthnonmagnetic layer 14 n provided between the fourth magnetic layer 14 andthe fourth opposing magnetic layer 14 o. The fourth magnetic layer 14,the fourth opposing magnetic layer 14 o, and the fourth nonmagneticlayer 14 n are included in a fourth stacked portion S4.

Multiple first interconnects 21 are provided in the example. Themultiple first interconnects 21 include interconnects 21A and 21B. Asshown in FIG. 9A, the sensor element 51A and the sensor element 51Boverlap the interconnect 21A. The sensor element 51C and the sensorelement 51D overlap the interconnect 21B.

One end 51Ae of the sensor element 51A is connected to the first circuit71. Another end 51Af of the sensor element 51A is connected to the thirdcircuit 73 and one end 51Be of the second sensor element 51B. Anotherend 51Bf of the sensor element 51B is set to, for example, one potential(e.g., the ground potential). One end 51Ce of the sensor element 51C isconnected to the first circuit 71. Another end 51Cf of the sensorelement 51C is connected to the third circuit 73 and one end 51De of thesensor element 51D. Another end 51Df of the sensor element 51D is setto, for example, one potential (e.g., the ground potential).

The interconnect 21A and the interconnect 21B are connected to thesecond circuit 72 via the interconnect 72 a and the interconnect 72 b.The second circuit 72 supplies the alternating current second currentCh1 to the interconnect 21A and the interconnect 21B. In FIG. 9A, theinterconnect 21A, the interconnect 21B, the interconnect 72 a, and theinterconnect 72 b are drawn as broken lines for easier viewing of thedrawing.

The first magnetic portion 61, the second magnetic portion 62, and athird magnetic portion 63 are provided in the example. Theconfigurations and materials described in reference to the firstmagnetic portion 61 and the second magnetic portion 62 are applicable tothe third magnetic portion 63. The third magnetic portion 63 also is aMFC.

A magnetic layer (e.g., the second opposing magnetic layer 12 o) of thesensor element 51B is positioned between the first magnetic portion 61and the second magnetic portion 62. A magnetic layer (e.g., the thirdopposing magnetic layer 13 o) of the sensor element 51C is positionedbetween the second magnetic portion 62 and the third magnetic portion63. On the other hand, a magnetic layer (e.g., the first opposingmagnetic layer 11 o) of the sensor element 51A is not provided betweenthe first magnetic portion 61 and the second magnetic portion 62. Amagnetic layer (e.g., the fourth opposing magnetic layer 14 o) of thesensor element 51D is not provided between the second magnetic portion62 and the third magnetic portion 63.

By such a configuration, the signal magnetic field Hsig that isamplified by the MFCs is applied to the sensor element 51B and thesensor element 51C. Compared to the sensor element 51A and the sensorelement 51D, a magnetic field that is at least 10 times greater isapplied to the sensor element 51B and the sensor element 51C.

For example, when the signal magnetic field Hsig is zero, the potentialsof intermediate points MP1 and MP2 match each other. The resistances ofthe sensor element 51A and the sensor element 51C change when the signalmagnetic field Hsig is applied. Therefore, the potentials of theintermediate points MP1 and MP2 fluctuate in mutually-reversedirections. For example, the intermediate point MP2 is negative when theintermediate point MP1 is positive. For example, the intermediate pointMP2 is positive when the intermediate point MP1 is negative. A potentialdifference occurs between the intermediate point MP1 and theintermediate point MP2 according to the signal magnetic field Hsig. Thepotential difference is sensed by the third circuit 73. The noise isreduced; and highly-sensitivity sensing is possible.

FIG. 10A and FIG. 10B are schematic views illustrating another magneticsensor according to the second embodiment.

FIG. 10A is a perspective plan view as viewed along arrow AA of FIG.10B. FIG. 10B is a line A1-A2 cross-sectional view of FIG. 10A.

As shown in FIG. 10A, the magnetic sensor 122 according to theembodiment includes multiple first sensor one-end interconnects 51 e(e.g., an interconnect 51 eA, an interconnect 51 eB, etc.) and multiplefirst sensor other-end interconnects 51 f (e.g., an interconnect 51 fA,an interconnect 51 fB, etc.).

In the magnetic sensor 122, the multiple first sensor elements 51 (thesensor elements 51A to 51D, etc.) are provided. The multiple firstinterconnects 21 (the interconnects 21A, 21B, etc.) are provided.

One (e.g., the interconnect 21A) of the multiple first interconnects 21overlaps the multiple first sensor elements 51 (the sensor elements 51Aand 51B) in the first stacking direction DS1 (the Z-axis direction). Themultiple first interconnects 21 are arranged in the cross direction (inthe example, the Y-axis direction) crossing the first length directionDL1 (in the example, the X-axis direction) and the first stackingdirection DS1 (in the example, the Z-axis direction).

The multiple first sensor one-end interconnects 51 e extend along thefirst length direction DL1. The multiple first sensor other-endinterconnects 51 f extend along the cross direction (in the example, theY-axis direction) recited above that crosses the first length directionDL1 and the first stacking direction DS1.

As shown in FIG. 10B, one (the interconnect 51 eA) of the multiple firstsensor one-end interconnects 51 e is electrically connected to a firstend ep1 of the first sensor element 51 (e.g., the sensor element 51A).One (e.g., the interconnect 51 fA) of the multiple first sensorother-end interconnects 51 f is electrically connected to a second endep2 of the first sensor element 51 (e.g., the sensor element 51A).

Thus, one of the multiple first sensor elements 51 is connected to oneof the multiple first sensor one-end interconnects 51 e and one of themultiple first sensor other-end interconnects 51 f. For example, themultiple first sensor one-end interconnects 51 e and the multiple firstsensor other-end interconnects 51 f are connected to the first circuit71 and the third circuit 73.

The multiple first sensor elements 51 are arranged two-dimensionallyalong the X-axis direction and the Y-axis direction.

In the example as shown in FIG. 10B, multiple stacked portions (stackedportions SB1 to SB4) are provided in one of the multiple first sensorelements 51. The first magnetic layer 11, the first opposing magneticlayer 11 o, and the first nonmagnetic layer 11 n are included in each ofthe stacked portions SB1 to SB4. The stacked portions SB1 to SB4 areconnected in series to each other. In the example, one end of thestacked portion SB1 is connected to the interconnect 51 eA by aconnection layer CL1. The other end of the stacked portion SB1 and oneend of the stacked portion SB2 are connected by a connection layer CL2.The other end of the stacked portion SB2 and one end of the stackedportion SB3 are connected by a connection layer CL3. The other end ofthe stacked portion SB3 and one end of the stacked portion SB4 areconnected by a connection layer CL4. The other end of the stackedportion SB4 and the interconnect 51 fA are connected by a connectionlayer CL5. In the example, a connection member CL6 that extends in theZ-axis direction is provided. The connection layer CL1 and theinterconnect 51 eA are electrically connected by the connection memberCL6.

As shown in FIG. 10A, optically transmissive spaces can be provided outof the multiple first sensor one-end interconnects 51 e, the multiplefirst sensor other-end interconnects 51 f, and the multiple firstinterconnects 21. As described below, for example, pixels (opticalsensors) of an image sensor may be provided in the opticallytransmissive spaces. Advanced sensing is possible by using both anoptical sensor and the magnetic sensor according to the embodiment.

An example of the configuration of the magnetic sensor 122 will now bedescribed. The length (the first length L1) in the X-axis direction ofone first magnetic layer 11 (pinned layer) is 2 μm. The length in theX-axis direction of the entire four first magnetic layers 11 is 12 μm.The number of the multiple stacked portions is four. The length (asecond length L2) in the Y-axis direction of the first magnetic layer 11is 1 μm. The resistance change ratio of one stacked portion is 200%. Forexample, the current that flows in one first sensor element 51 (sensorelement 51A) is 0.2 mA. The resistance (when the resistance is low) ofthe sensor element 51A is 10 kΩ. The saturation magnetic field Hs of thefirst opposing magnetic layer 11 o is 65 oersteds (Oe). The magneticthickness of the first opposing magnetic layer 11 o is 5 nm·teslas. TheHooge constant of the 1/f noise is 8×10⁻⁸. The frequency (thealternating current frequency fac) of the second current Ch1 flowing inthe first interconnect 21 is 10 MHz. It is assumed that the 1/f noiseand the thermal noise are the noise sources.

In such a model, the difference of the positive and negative signalvoltages in a high frequency domain at the 10 MHz vicinity is sensed asthe output. The low frequency fluctuation component is reset or removed.Therefore, the 1/f noise decreases.

For example, a signal magnetic field Hsig of 10 Hz is sensed by themagnetic sensor 122 according to the embodiment. In the embodiment, thenoise can be reduced drastically compared to a general TMR sensor inwhich a spin-valve type linear response is utilized.

For example, in a general micro-sized TMR sensor of about 20 μmutilizing a spin-valve type linear response, a magnetic field of about100 nT is the limit of the sensing. Conversely, in the embodiment, forexample, a micro magnetic field of 0.1 nT to 1 nT can be sensed.Highly-sensitivity sensing is possible.

For example, in the sensing of electric activity of cells cultured on asensor substrate, the distance between the sensor and the cell is set to1 μm to 10 μm. In such a case, it is considered that the magnetic fieldfrom the cell activity is about 1 nT to 10 nT. According to the magneticsensor according to the embodiment, the sensing of the activity of thecultured cell is possible.

FIG. 11A to FIG. 11C are schematic views illustrating another magneticsensor according to the second embodiment.

FIG. 11A is a perspective plan view as viewed along arrow AA of FIG. 11Band FIG. 11C. FIG. 11B is a line E1-E2 cross-sectional view of FIG. 11A.FIG. 11C is a line F1-F2 cross-sectional view of FIG. 11A.

The first sensor element 51 is provided as shown in FIG. 11A. Asdescribed above, the first magnetic layer 11 of the first sensor element51 extends along the first length direction DL1 (in the example, theX-axis direction). A second sensor element 52 is further provided in themagnetic sensor 123. The second sensor element 52 extends along adirection crossing the direction in which the first sensor element 51extends. A second interconnect 22 is further provided. The second sensorelement 52 and the second interconnect 22 will now be described.

As shown in FIG. 11B and FIG. 11C, the second sensor element 52 includesthe second magnetic layer 12, the second opposing magnetic layer 12 o,and the second nonmagnetic layer 12 n. The second nonmagnetic layer 12 nis provided between the second magnetic layer 12 and the second opposingmagnetic layer 12 o. The second magnetic layer 12, the second opposingmagnetic layer 12 o, and the second nonmagnetic layer 12 n are includedin the second stacked portion S2.

For example, the second magnetic layer 12, the second opposing magneticlayer 12 o, and the second nonmagnetic layer 12 n respectively includethe materials described in reference to the first magnetic layer 11, thefirst opposing magnetic layer 11 o, and the first nonmagnetic layer 11n.

A second magnetization M2 of the second magnetic layer 12 is alignedwith a second length direction DL2. The second length direction DL2crosses the first length direction DL1. In the example, the secondlength direction DL2 is aligned with the Y-axis direction.

A second stacking direction DS2 from the second magnetic layer 12 towardthe second opposing magnetic layer 12 o crosses the second lengthdirection DL2. In the example, the second stacking direction DS2 isaligned with the Z-axis direction.

At least a portion of the second interconnect 22 extends along thesecond length direction DL2. A second interconnect cross direction DC2from the second sensor element 52 toward the at least a portion of thesecond interconnect 22 recited above crosses the second length directionDL2. In the example, the second interconnect cross direction DC2 isaligned with the Z-axis direction. A distance d2 between the secondinterconnect 22 and the second sensor element 52 may be substantiallythe same as the distance d1.

The direction in which the second sensor element 52 extends crosses thedirection in which the first sensor element 51 extends; and thedirection in which the second interconnect 22 extends crosses thedirection in which the first interconnect 21 extends. Otherwise, theconfiguration of the first sensor element 51 is applicable to the secondsensor element 52; and the configuration of the first interconnect 21 isapplicable to the second interconnect 22.

For example, a second electrical resistance of the second sensor element52 changes according to the current flowing in the second interconnect22 and the sensed magnetic field (the signal magnetic field Hsig)applied to the second sensor element 52.

A portion of the second interconnect 22 overlaps the second sensorelement 52 in the second interconnect cross direction DC2. The directionof the current flowing in the portion of the second interconnect 22 isaligned with the magnetization direction of the second magnetic layer12. An alternating-current magnetic field is generated by the currentflowing through the second interconnect 22. The alternating-currentmagnetic field has a component in the width direction of the secondsensor element 52 (a direction crossing a plane formed by the secondlength direction DL2 and the second stacking direction DS2, e.g., theX-axis direction). For example, the characteristics of the change of thesecond electrical resistance of the second sensor element 52 are similarto the characteristics of the change of the first electrical resistanceof the first sensor element 51.

In such a case as well, it is favorable to provide shape anisotropy tothe second sensor element 52. As shown in FIG. 11B, the length in thesecond length direction DL2 of the second magnetic layer 12 is taken asa third length L3. As shown in FIG. 11C, the length in a second widthdirection DW2 of the second magnetic layer 12 is taken as a fourthlength L4. The second width direction DW2 is aligned with the firstlength direction DL1 (the X-axis direction). The third length L3 islonger than the fourth length L4. For example, the third length L3 isnot less than 1.5 times the fourth length L4.

The second sensor element 52 is connected to the first circuit 71. Thesecond interconnect 22 is connected to the third circuit 73. The changeof the second electrical resistance of the second sensor element 52 issensed by the second circuit 72.

For example, the first sensor element 51 can sense the Y-axis directioncomponent of the sensed magnetic field. The second sensor element 52 cansense the X-axis direction component of the sensed magnetic field. Theoutput obtained from the first sensor element 51 (the signalcorresponding to the change of the first electrical resistance) and theoutput obtained from the second sensor element 52 (the signalcorresponding to the change of the second electrical resistance) arecompared. The direction in the X-Y plane of the signal magnetic fieldHsig can be sensed by providing such a first sensor element 51, such asecond sensor element 52, such a first interconnect 21, and such asecond interconnect 22.

The multiple first sensor elements 51 (the sensor elements 51A to 51D),the multiple second sensor elements 52 (sensor elements 52A to 52D), themultiple first interconnects 21 (the interconnects 21A and 21B), and themultiple second interconnects 22 (interconnects 22A and 22B) areprovided in the magnetic sensor 123. The multiple first sensor one-endinterconnects 51 e (the interconnects 51 eA and 51 eB), the multiplefirst sensor other-end interconnects 51 f (the interconnects 51 fA and51 fB), and multiple second sensor one-end interconnects S2 e (aninterconnect 52 eA and an interconnect 52 eB) are further provided.

The multiple first interconnects 21 are arranged in the cross direction(in the example, the Y-axis direction) crossing the first lengthdirection DL1 and the first stacking direction DS1. One of the multiplefirst interconnects 21 (e.g., the interconnect 21A) overlaps one of themultiple first sensor elements 51 (e.g., the sensor element 51A) in thefirst stacking direction DS1 (e.g., the Z-axis direction).

The multiple first sensor one-end interconnects 51 e extend along thefirst length direction DL1. One of the multiple first sensor one-endinterconnects 51 e (e.g., the interconnect 51 eA) is electricallyconnected to the first end ep1 of one of the multiple first sensorelements 51 (the sensor element 51A). The electrical connection isperformed by, for example, an interconnect layer (e.g., at least one ofthe connection layers CL1 to CL5, etc.), a connection member (e.g., theconnection member CL6, etc.), etc. The interconnect layers and theconnection members may include a portion extending in any direction.

The multiple first sensor other-end interconnects 51 f extend along thecross direction (e.g., the Y-axis direction) recited above that crossesthe first length direction DL1 and the first stacking direction DS1. Oneof the multiple first sensor other-end interconnects 51 f (e.g., theinterconnect 51 fA) is electrically connected to the second end ep2 ofthe one of the multiple first sensor elements 51 recited above (thesensor element 51A). The electrical connection is performed by, forexample, an interconnect layer, a connection member, etc. Theinterconnect layer and the connection member may include a portionextending in any direction.

At least a portion of one of the multiple second interconnects 22 (theinterconnects 22A, 22B, etc.) overlaps at least a portion of one of themultiple first sensor other-end interconnects 51 f in the firstinterconnect cross direction Dc1 (in the example, the Z-axis direction)recited above. For example, the interconnect 22A overlaps theinterconnect 51 fA.

The multiple second sensor one-end interconnects 52 e extend along thefirst length direction DL1. At least a portion of one of the multiplesecond sensor one-end interconnects 52 e is parallel to at least aportion of one of the multiple first sensor one-end interconnects 51 e.One of the multiple second sensor one-end interconnects 52 e (e.g., 52eA) is electrically connected to a third end ep3 of one (e.g., thesensor element S2A) of the multiple second sensor elements 52 (thesensor elements 52A to 52D). One of the multiple first sensor other-endinterconnects 51 f (e.g., the interconnect 51 fA) is electricallyconnected to a fourth end ep4 of the one of the multiple second sensorelements 52 recited above (the sensor element 52A). The electricalconnection is performed by, for example, an interconnect layer, aconnection member (e.g., connection members CL7 and CL8 illustrated inFIG. 11B, etc.), etc. The interconnect layer and the connection membermay include a portion extending in any direction.

In the example, the multiple first sensor other-end interconnects 51 fare connected to the multiple first sensor elements 51 and connected tothe multiple second sensor elements 52. The multiple first sensorother-end interconnects 51 f are used by the multiple first sensorelements 51 and the multiple second sensor elements 52.

The multiple first interconnects 21 and the multiple secondinterconnects 22 are electrically connected to the third circuit 73. Themultiple first sensor one-end interconnects 51 e, the multiple firstsensor other-end interconnects 51 f, and the multiple second sensorone-end interconnects 52 e are electrically connected to the firstcircuit 71 and the second circuit 72.

By such a configuration, the distribution in the X-Y plane of the signalmagnetic field Hsig in any direction can be sensed with low noise andhigh sensitivity.

Third Embodiment

A magnetic sensor according to the embodiment is applicable to, forexample, a biological cell sensing device, etc.

FIG. 12 is a schematic view illustrating the magnetic sensor and thebiological cell sensing device according to the third embodiment.

As shown in FIG. 12, the multiple first sensor one-end interconnects 51e, the multiple first sensor other-end interconnects 51 f, the multiplefirst sensor elements 51, and the multiple first interconnects 21 areprovided in the magnetic sensor 130 according to the embodiment. Thesecomponents are similar to those of the magnetic sensor 122; and adescription is therefore omitted.

Multiple pixels 60 (e.g., optical sensors) are provided in the magneticsensor 130. One of the multiple pixels 60 is provided in the gap betweenthe multiple first sensor one-end interconnects 51 e and the multiplefirst sensor other-end interconnects 51 f. For example, the pixels 60correspond to pixels of an image sensor. The image sensor includes, forexample, a CMOS sensor, etc. For example, the multiple magnetic sensorelements and the image sensor (the pixels 60) are provided on asubstrate. Cells are cultured on the substrate. The magnetic cellactivity information and the optical cell activity information of thecultured cells can be sensed. At least a portion of the magnetic cellactivity information and at least a portion of the optical cell activityinformation may be sensed simultaneously. Advanced sensing is possibleby using the optical sensor and the sensor using the magnetic field byusing the magnetic sensor according to the embodiment.

A circuit portion 70 may be included in the magnetic sensor 130. Thecircuit portion 70 includes the first circuit 71, the second circuit 72,and the third circuit 73.

The biological cell sensing device 400 according to the embodimentincludes the magnetic sensor 130 and a receiver 75. The receiver 75receives a signal (the information) output from the magnetic sensor 130.The biological cell sensing device 400 senses the state of thebiological cells by using the signal (the information). The pixels ofthe magnetic sensor included in the biological cell sensing device 400may be omitted. In such a case, the biological cell sensing device 400senses the state of the biological cells by using the signal (theinformation) obtained by the magnetic sensor.

Fourth Embodiment

A magnetic sensor according to the embodiment is applicable to, forexample, a diagnostic device, etc.

FIG. 13 is a schematic view showing the magnetic sensor and thediagnostic device according to the fourth embodiment.

As shown in FIG. 13, the diagnostic device 500 includes the magneticsensor 150. The magnetic sensor 150 includes the magnetic sensors (andthe magnetic sensor devices) described in reference to the firstembodiment and the second embodiment and modifications of the magneticsensors (and the magnetic sensor devices).

In the diagnostic device 500, the magnetic sensor 150 is, for example, amagnetoencephalograph device. The magnetoencephalograph device senses amagnetic field generated by cranial nerves. In the case where themagnetic sensor 150 is included in a magnetoencephalograph device, thesize of the magnetic element included in the magnetic sensor 150 is, forexample, not less than 1 mm but less than 10 mm. The size is, forexample, the length including the flux focus path.

As shown in FIG. 13, the magnetic sensor 150 (the magnetoencephalographdevice) is mounted to, for example, the head of a human body. Themagnetic sensor 150 (the magnetoencephalograph device) includes a sensorportion 301 (the first sensor portion SU1 or the like). The magneticsensor 150 (the magnetoencephalograph device) may include multiplesensor portions 301 (the first sensor portion SU1, the second sensorportion SU2, etc.). The number of the multiple sensor portions 301 is,for example, about 100 (e.g., not less than 50 and not more than 150).The multiple sensor portions 301 are provided in a base body 302 that isflexible.

The magnetic sensor 150 may include, for example, a circuit fordifferential sensing, etc. The magnetic sensor 150 may include a sensorother than a magnetic sensor (e.g., a potential terminal, anacceleration sensor, etc.).

The size of the magnetic sensor 150 (the magnetic sensors described inreference to the first embodiment and the second embodiment) is smallcompared to the size of a conventional SQUID magnetic sensor. Therefore,the mounting of the multiple sensor portions 301 is easy. The mountingof the multiple sensor portions 301 and the other circuits is easy. Itis easy for the multiple sensor portions 301 to coexist with the othersensors.

The base body 302 may include, for example, an elastic body such as asilicone resin, etc. For example, the multiple sensor portions 301 areprovided in the base body 302 by being linked to each other. Forexample, the base body 302 can be closely adhered to the head.

An input/output cord 303 of the sensor portion 301 is connected to asignal input/output portion 504 and a sensor driver 506 of thediagnostic device 500. Magnetic field measurement is performed in thesensor portion 301 based on the electrical power from the sensor driver506 and the control signal from the signal input/output portion 504. Theresult is input to the signal input/output portion 504. The signal thatis obtained by the signal input/output portion 504 is supplied to asignal processor 508. Processing such as, for example, the removal ofnoise, filtering, amplification, signal calculation, etc., are performedin the signal processor 508. The signal that is processed by the signalprocessor 508 is supplied to a signal analyzer 510. For example, thesignal analyzer 510 extracts a designated signal formagnetoencephalography. For example, signal analysis to match the signalphases is performed in the signal analyzer 510.

The output of the signal analyzer 510 (the data for which the signalanalysis has ended) is supplied to a data processor 512. Data analysisis performed in the data processor 512. It is possible to include imagedata such as, for example, MRI (Magnetic Resonance Imaging), etc., inthe data analysis. It is possible to include, for example, scalppotential information such as an EEG (Electroencephalogram), etc., inthe data analysis. For example, nerve firing point analysis, inverseanalysis, or the like is performed by the data analysis.

For example, the result of the data analysis is supplied to an imagingdiagnostic portion 516. Imaging is performed by the imaging diagnosticportion 516. The diagnosis is supported by the imaging.

For example, the series of operations recited above is controlled by acontrol mechanism 502. For example, necessary data such as preliminarysignal data, metadata partway through the data processing, or the likeis stored in a data server. The data server and the control mechanismmay be integrated.

The diagnostic device 500 according to the embodiment includes themagnetic sensor 150, and a processor that processes the signal obtainedfrom the magnetic sensor 150. The processor includes, for example, atleast one of the signal processor 508 or the data processor 512. Theprocessor includes, for example, a computer, etc.

In the magnetic sensor 150 shown in FIG. 13, the sensor portion 301 ismounted to the head of a human body. The sensor portion 301 may bemounted to the chest of the human body. Thereby, a magnetocardiographyis possible. For example, the sensor portion 301 may be mounted to theabdomen of a pregnant woman. Thereby, palmoscopy of the fetus can beperformed.

It is favorable for the magnetic sensor device including the participantto be mounted inside a shielded room. Thereby, for example, the effectsof geomagnetism or magnetic noise can be suppressed.

For example, a mechanism may be provided to locally shield the sensorportion 301 or the measurement section of the human body. For example, ashield mechanism may be provided in the sensor portion 301. For example,the signal analysis or the data processing may be effectively shielded.

In the embodiment, the base body 302 may be flexible or substantiallymay not be flexible. In the example shown in FIG. 13, the base body 302is a continuous film that is patterned into a hat-like configuration.The base body 302 may have a net configuration. Thereby, for example,good wearability is obtained. For example, the adhesion of the base body302 with the human body improves. The base body 302 may have a hardhelmet-like configuration.

FIG. 14 is a schematic view showing another magnetic sensor according tothe fourth embodiment.

FIG. 14 is an example of a magnetic sensing instrument. In the exampleshown in FIG. 14, the sensor portion 301 is provided on a hard base body305 having a flat plate configuration.

The input and output of the signal obtained from the sensor portion 301in the example shown in FIG. 14 is similar to the input and outputdescribed in reference to FIG. 13. The processing of the signal obtainedfrom the sensor portion 301 in the example shown in FIG. 14 is similarto the processing described in reference to FIG. 13.

The embodiments may include the following configurations (e.g.,“technological proposals”).

Configuration 1

A magnetic sensor, comprising:

a first sensor element including a first magnetic layer, a firstopposing magnetic layer, and a first nonmagnetic layer provided betweenthe first magnetic layer and the first opposing magnetic layer, a firstmagnetization of the first magnetic layer being aligned with a firstlength direction, a first stacking direction from the first magneticlayer toward the first opposing magnetic layer crossing the first lengthdirection; and

a first interconnect, at least a portion of the first interconnectextending along the first length direction, a first interconnect crossdirection crossing the first length direction, the first interconnectcross direction being from the first sensor element toward the at leasta portion of the first interconnect,

a first electrical resistance of the first sensor element changingaccording to a current flowing in the first interconnect and a sensedmagnetic field applied to the first sensor element.

Configuration 2

The magnetic sensor according to Configuration 1, wherein

the first electrical resistance increases when the current flowing inthe first interconnect has a positive polarity and the absolute value ofthe current increases, and

the first electrical resistance increases when the current flowing inthe first interconnect has a negative polarity and the absolute value ofthe current increases.

Configuration 3

The magnetic sensor according to Configuration 2, wherein the firstelectrical resistance when the current does not flow in the firstinterconnect is not less than 1 times and not more than 1.002 times theminimum value of the first electrical resistance obtained when thecurrent flowing in the first interconnect changes.

Configuration 4

A magnetic sensor, comprising:

a first sensor element including a first magnetic layer, a firstopposing magnetic layer, and a first nonmagnetic layer provided betweenthe first magnetic layer and the first opposing magnetic layer, a firststacking direction from the first magnetic layer toward the firstopposing magnetic layer crossing the first length direction; and

a first interconnect, at least a portion of the first interconnectextending along the first length direction, a first interconnect crossdirection crossing the first length direction, the first interconnectcross direction being from the first sensor element toward the at leasta portion of the first interconnect,

a first electrical resistance of the first sensor element changingaccording to a current flowing in the first interconnect and a sensedmagnetic field applied to the first sensor element,

the first electrical resistance increasing when the current flowing inthe first interconnect has a positive polarity and the absolute value ofthe current increases,

the first electrical resistance increasing when the current flowing inthe first interconnect has a negative polarity and the absolute value ofthe current increases,

the first electrical resistance when the current does not flow in thefirst interconnect being not less than 1 times and not more than 1.002times the minimum value of the first electrical resistance obtained whenthe current flowing in the first interconnect changes.

Configuration 5

A magnetic sensor, comprising:

a first sensor element including a first magnetic layer, a firstopposing magnetic layer, and a first nonmagnetic layer provided betweenthe first magnetic layer and the first opposing magnetic layer, a firstmagnetization of the first magnetic layer being aligned with the firstlength direction, a first stacking direction from the first magneticlayer toward the first opposing magnetic layer crossing the first lengthdirection; and

a first interconnect, at least a portion of the first interconnectextending along the first length direction, a first interconnect crossdirection crossing the first length direction, the first interconnectcross direction being from the first sensor element toward the at leasta portion of the first interconnect,

a first electrical resistance of the first sensor element changingaccording to a current flowing in the first interconnect and a sensedmagnetic field applied to the first sensor element,

an orientation of a magnetization of the first opposing magnetic layerbeing changeable,

the first electrical resistance increasing when the current flowing inthe first interconnect has a positive polarity and the absolute value ofthe current increases,

the first electrical resistance increasing when the current flowing inthe first interconnect has a negative polarity and the absolute value ofthe current increases,

the first electrical resistance when the current does not flow in thefirst interconnect being not less than 1 times and not more than 1.002times the minimum value of the first electrical resistance obtained whenthe current flowing in the first interconnect changes.

Configuration 6

The magnetic sensor according to any one of Configurations 1 to 5,wherein

a first length in the first length direction of the first magnetic layeris longer than a second length in the first width direction of the firstmagnetic layer, and

the first width direction crosses a plane including the first stackingdirection and the first length direction.

Configuration 7

The magnetic sensor according to any one of Configurations 1 to 6,wherein the first interconnect cross direction is aligned with the firststacking direction.

Configuration 8

The magnetic sensor according to any one of Configurations 1 to 7,wherein the first nonmagnetic layer includes Cu.

Configuration 9

The magnetic sensor according to any one of Configurations 1 to 7,wherein

the first sensor element further includes another first magnetic layerand another first nonmagnetic layer,

the first opposing magnetic layer is positioned between the firstmagnetic layer and the other first magnetic layer in the first stackingdirection, and

the other first nonmagnetic layer is positioned between the other firstmagnetic layer and the first opposing magnetic layer in the firststacking direction.

Configuration 10

The magnetic sensor according to any one of Configurations 1 to 7,wherein

the first sensor element further includes another first magnetic layer,

the first opposing magnetic layer includes a first partial region and asecond partial region,

a portion of the first nonmagnetic layer is positioned between the firstmagnetic layer and the first partial region,

another portion of the first nonmagnetic layer is positioned between theother first magnetic layer and the second partial region, and

the first electrical resistance includes an electrical resistance of acurrent flowing through the first magnetic layer, the first opposingmagnetic layer, and the other first magnetic layer.

Configuration 11

The magnetic sensor according to Configuration 9 or 10, wherein thefirst nonmagnetic layer includes MgO.

Configuration 12

The magnetic sensor according to any one of Configurations 1 to 10,further comprising:

a first circuit electrically connected to the first sensor element, thefirst circuit supplying a first current to the first sensor element, thefirst current flowing through a first current path including the firstmagnetic layer, the first nonmagnetic layer, and the first opposingmagnetic layer;

a second circuit electrically connected to the first interconnect, thesecond circuit supplying a second current to the first interconnect, thesecond current being alternating current; and

a third circuit sensing the change of the first electrical resistance.

Configuration 13

The magnetic sensor according to Configuration 12, wherein

the second current has a first frequency, and

the third circuit senses an alternating current signal having afrequency in a range including the first frequency.

Configuration 14

The magnetic sensor according to Configuration 12, wherein the thirdcircuit includes a lock-in amplifier.

Configuration 15

The magnetic sensor according to Configuration 12, wherein

the second current has a first frequency, and

the third circuit includes:

-   -   a filter, a signal corresponding to the first electrical        resistance being input to the filter, the filter attenuating a        signal of a frequency of 2 times the first frequency or more;        and    -   a lock-in amplifier, an output of the filter being input to the        lock-in amplifier.        Configuration 16

The magnetic sensor according to Configuration 10, further comprising astacked body, the stacked body including two magnetic layers and anonmagnetic layer, the nonmagnetic layer being provided between the twomagnetic layers,

a strength of the sensed magnetic field applied to the stacked bodybeing smaller than a strength of the sensed magnetic field applied tothe first sensor element,

the third circuit outputting a signal corresponding to a differencebetween a signal obtained from the stacked body and a signal obtainedfrom the first sensor element.

Configuration 17

The magnetic sensor according to any one of Configurations 1 to 16,wherein

the first sensor element further includes a first magnetic portion and asecond magnetic portion,

the first opposing magnetic layer is positioned between the firstmagnetic portion and the second magnetic portion in a direction crossinga plane including the first stacking direction and the first lengthdirection,

a thickness along the first stacking direction of the first magneticportion is thicker than a thickness along the first stacking directionof the first opposing magnetic layer, and

a thickness along the first stacking direction of the second magneticportion is thicker than a thickness along the first stacking direction,of the first opposing magnetic layer.

Configuration 18

The magnetic sensor according to any one of Configurations 1 to 17,further comprising:

multiple first sensor one-end interconnects; and

multiple first sensor other-end interconnects,

the first sensor element being multiply provided,

the first interconnect being multiply provided,

one of the multiple first interconnects overlapping the multiple firstsensor elements in the first stacking direction,

the multiple first interconnects being arranged in a cross directioncrossing the first length direction and the first stacking direction,

the multiple first sensor one-end interconnects extending along thefirst length direction,

one of the multiple first sensor one-end interconnects beingelectrically connected to a first end of the first sensor element,

the multiple first sensor other-end interconnects extending along thecross direction crossing the first length direction and the firststacking direction,

one of the multiple first sensor other-end interconnects beingelectrically connected to a second end of the first sensor element.

Configuration 19

The magnetic sensor according to any one of Configurations 1 to 17,further comprising:

a second sensor element; and

a second interconnect,

the second sensor element including a second magnetic layer, a secondopposing magnetic layer, and a second nonmagnetic layer provided betweenthe second magnetic layer and the second opposing magnetic layer,

a second magnetization of the second magnetic layer being aligned with asecond length direction, a second stacking direction from the secondmagnetic layer toward the second opposing magnetic layer crossing thesecond length direction,

the second length direction crossing the first length direction,

at least a portion of the second interconnect extending along the secondlength direction, a second interconnect cross direction crossing thesecond length direction, the second interconnect cross direction beingfrom the second sensor element toward the at least a portion of thesecond interconnect,

a second electrical resistance of the second sensor element changingaccording to a current flowing in the second interconnect and the sensedmagnetic field applied to the second sensor element.

Configuration 20

The magnetic sensor according to Configuration 19, wherein

a third length in the second length direction of the second magneticlayer is longer than a fourth length in the second width direction ofthe second magnetic layer, and

the second width direction is aligned with the first length direction.

Configuration 21

The magnetic sensor according to Configuration 19 or 20, furthercomprising:

multiple first sensor one-end interconnects;

multiple first sensor other-end interconnects; and

multiple second sensor one-end interconnects,

the first sensor element being multiply provided,

the first interconnect being multiply provided,

the multiple first interconnects being arranged in a cross directioncrossing the first length direction and the first stacking direction,

one of the multiple first interconnects overlapping one of the multiplefirst sensor elements in the first stacking direction,

the multiple first sensor one-end interconnects extending along thefirst length direction,

one of the multiple first sensor one-end interconnects beingelectrically connected to a first end of the one of the multiple firstsensor elements,

the multiple first sensor other-end interconnects extending along thecross direction crossing the first length direction and the firststacking direction,

one of the multiple first sensor other-end interconnects beingelectrically connected to a second end of the one of the multiple firstsensor elements,

the second sensor element being multiply provided,

the second interconnect being multiply provided,

at least a portion of one of the multiple second

interconnects overlapping at least a portion of one of the multiplefirst sensor other-end interconnects in the first interconnect crossdirection,

the multiple second sensor one-end interconnects extending along thefirst length direction,

one of the multiple second sensor one-end interconnects beingelectrically connected to a third end of one of the multiple secondsensor elements,

one of the multiple first sensor other-end interconnects beingelectrically connected to a fourth end of the one of the multiple secondsensor elements.

Configuration 22

A biological cell sensing device, comprising:

the magnetic sensor according to any one of Configurations 1 to 21; and

a receiver receiving a signal output from the magnetic sensor.

Configuration 23

A diagnostic device, comprising:

the magnetic sensor according to any one of Configurations 1 to 21; and

a processor processing a signal obtained from the magnetic sensor.

According to the embodiments, a magnetic sensor, a biological cellsensing device, and a diagnostic device can be provided in which thesensing sensitivity can be increased.

In the specification of the application, “perpendicular” and “parallel”refer to not only strictly perpendicular and strictly parallel but alsoinclude, for example, the fluctuation due to manufacturing processes,etc. It is sufficient to be substantially perpendicular andsubstantially parallel.

Hereinabove, exemplary embodiments of the invention are described withreference to specific examples. However, the embodiments of theinvention are not limited to these specific examples. For example, oneskilled in the art may similarly practice the invention by appropriatelyselecting specific configurations of components included in magneticsensors such as magnetic layers, non-magnetic layers, conductive layers,interconnects, circuits, etc., from known art. Such practice is includedin the scope of the invention to the extent that similar effects theretoare obtained.

Further, any two or more components of the specific examples may becombined within the extent of technical feasibility and are included inthe scope of the invention to the extent that the purport of theinvention is included.

Moreover, all magnetic sensors practicable by an appropriate designmodification by one skilled in the art based on the magnetic sensorsdescribed above as embodiments of the invention also are within thescope of the invention to the extent that the spirit of the invention isincluded.

Various other variations and modifications can be conceived by thoseskilled in the art within the spirit of the invention, and it isunderstood that such variations and modifications are also encompassedwithin the scope of the invention.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theInventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the invention.

What is claimed is:
 1. A magnetic sensor, comprising: a first sensorelement including a first magnetic layer, a first opposing magneticlayer, and a first nonmagnetic layer provided between the first magneticlayer and the first opposing magnetic layer, a first magnetization ofthe first magnetic layer being aligned with a first length direction, afirst stacking direction from the first magnetic layer toward the firstopposing magnetic layer crossing the first length direction; and a firstinterconnect, at least a portion of the first interconnect extendingalong the first length direction, a first interconnect cross directioncrossing the first length direction, the first interconnect crossdirection being from the first sensor element toward the at least aportion of the first interconnect, a first electrical resistance of thefirst sensor element changing according to an alternating currentflowing in the first interconnect and a sensed magnetic field applied tothe first sensor element, wherein the first electrical resistanceincreases when the alternating current flowing in the first interconnecthas a positive polarity and the absolute value of the current increases,and the first electrical resistance increases when the alternatingcurrent flowing in the first interconnect has a negative polarity andthe absolute value of the current increases, the first electricalresistance when the alternating current does not flow in the firstinterconnect is more than 1 times and less than 1.002 times a minimumvalue of the first electrical resistance obtained when the alternatingcurrent flowing in the first interconnect is changed.
 2. The sensoraccording to claim 1, wherein a first length in the first lengthdirection of the first magnetic layer is longer than a second length ina first width direction of the first magnetic layer, and the first widthdirection crosses a plane including the first stacking direction and thefirst length direction.
 3. The sensor according to claim 1, wherein thefirst interconnect cross direction is aligned with the first stackingdirection.
 4. The sensor according to claim 1, wherein the firstnonmagnetic layer includes Cu.
 5. The sensor according to claim 1,wherein the first sensor element further includes another first magneticlayer and another first nonmagnetic layer, the first opposing magneticlayer is positioned between the first magnetic layer and the other firstmagnetic layer in the first stacking direction, and the other firstnonmagnetic layer is positioned between the other first magnetic layerand the first opposing magnetic layer in the first stacking direction.6. The sensor according to claim 1, wherein the first sensor elementfurther includes a first magnetic portion and a second magnetic portion,the first opposing magnetic layer is positioned between the firstmagnetic portion and the second magnetic portion in a direction crossinga plane including the first stacking direction and the first lengthdirection, a thickness along the first stacking direction of the firstmagnetic portion is thicker than a thickness along the first stackingdirection of the first opposing magnetic layer, and a thickness alongthe first stacking direction of the second magnetic portion is thickerthan the thickness along the first stacking direction of the firstopposing magnetic layer.
 7. The sensor according to claim 1, furthercomprising: a plurality of first sensor one-end interconnects; and aplurality of first sensor other-end interconnects, a plurality of thefirst sensor elements being provided, a plurality of the firstinterconnects being provided, one of the plurality of firstinterconnects overlapping the plurality of first sensor elements in thefirst stacking direction, the plurality of first interconnects beingarranged in a cross direction crossing the first length direction andthe first stacking direction, the plurality of first sensor one-endinterconnects extending along the first length direction, one of theplurality of first sensor one-end interconnects being electricallyconnected to a first end of the first sensor element, the plurality offirst sensor other-end interconnects extending along the cross directioncrossing the first length direction and the first stacking direction,one of the plurality of first sensor other-end interconnects beingelectrically connected to a second end of the first sensor element. 8.The sensor according to claim 1, further comprising: a second sensorelement; and a second interconnect, the second sensor element includinga second magnetic layer, a second opposing magnetic layer, and a secondnonmagnetic layer provided between the second magnetic layer and thesecond opposing magnetic layer, a second magnetization of the secondmagnetic layer being aligned with a second length direction, a secondstacking direction from the second magnetic layer toward the secondopposing magnetic layer crossing the second length direction, the secondlength direction crossing the first length direction, at least a portionof the second interconnect extending along the second length direction,a second interconnect cross direction crossing the second lengthdirection, the second interconnect cross direction being from the secondsensor element toward the at least a portion of the second interconnect,a second electrical resistance of the second sensor element changingaccording to an alternating current flowing in the second interconnectand the sensed magnetic field applied to the second sensor element. 9.The sensor according to claim 8, wherein a third length in the secondlength direction of the second magnetic layer is longer than a fourthlength in a second width direction of the second magnetic layer, and thesecond width direction is aligned with the first length direction. 10.The sensor according to claim 8, further comprising: a plurality offirst sensor one-end interconnects; a plurality of first sensorother-end interconnects; and a plurality of second sensor one-endinterconnects, a plurality of the first sensor elements being provided,a plurality of the first interconnects being provided, the plurality offirst interconnects being arranged in a cross direction crossing thefirst length direction and the first stacking direction, one of theplurality of first interconnects overlapping one of the plurality offirst sensor elements in the first stacking direction, the plurality offirst sensor one-end interconnects extending along the first lengthdirection, one of the plurality of first sensor one-end interconnectsbeing electrically connected to a first end of the one of the pluralityof first sensor elements, the plurality of first sensor other-endinterconnects extending along the cross direction crossing the firstlength direction and the first stacking direction, one of the pluralityof first sensor other-end interconnects being electrically connected toa second end of the one of the plurality of first sensor elements, aplurality of the second sensor elements being provided, a plurality ofthe second interconnects being provided, at least a portion of one ofthe plurality of second interconnects overlapping at least a portion ofone of the plurality of first sensor other-end interconnects in thefirst interconnect cross direction, the plurality of second sensorone-end interconnects extending along the first length direction, one ofthe plurality of second sensor one-end interconnects being electricallyconnected to a third end of one of the plurality of second sensorelements, one of the plurality of first sensor other-end interconnectsbeing electrically connected to a fourth end of the one of the pluralityof second sensor elements.
 11. A biological cell sensing device,comprising: the magnetic sensor according to claim 1; and a receiverreceiving a signal output from the magnetic sensor.
 12. A diagnosticdevice, comprising: the magnetic sensor according to claim 1; and aprocessor processing a signal obtained from the magnetic sensor.
 13. Amagnetic sensor, comprising: a first sensor element including a firstmagnetic layer, a first opposing magnetic layer, and a first nonmagneticlayer provided between the first magnetic layer and the first opposingmagnetic layer, a first magnetization of the first magnetic layer beingaligned with a first length direction, a first stacking direction fromthe first magnetic layer toward the first opposing magnetic layercrossing the first length direction; and a first interconnect, at leasta portion of the first interconnect extending along the first lengthdirection, a first interconnect cross direction crossing the firstlength direction, the first interconnect cross direction being from thefirst sensor element toward the at least a portion of the firstinterconnect, a first electrical resistance of the first sensor elementchanging according to an alternating current flowing in the firstinterconnect and a sensed magnetic field applied to the first sensorelement, wherein the first sensor element further includes another firstmagnetic layer, the first opposing magnetic layer includes a firstpartial region and a second partial region, a portion of the firstnonmagnetic layer is positioned between the first magnetic layer and thefirst partial region, another portion of the first nonmagnetic layer ispositioned between the other first magnetic layer and the second partialregion, and the first electrical resistance includes an electricalresistance of a current flowing from the first magnetic layer to theother first magnetic layer by way of the first opposing magnetic layer.14. The sensor according to claim 13, wherein the first nonmagneticlayer includes MgO.
 15. The sensor according to claim 13, furthercomprising a stacked body, the stacked body including two magneticlayers and a nonmagnetic layer, the nonmagnetic layer being providedbetween the two magnetic layers, a strength of the sensed magnetic fieldapplied to the stacked body being smaller than a strength of the sensedmagnetic field applied to the first sensor element, the third circuitoutputting a signal corresponding to a difference between a signalobtained from the stacked body and a signal obtained from the firstsensor element.
 16. A magnetic sensor, comprising: a first sensorelement including a first magnetic layer, a first opposing magneticlayer, and a first nonmagnetic layer provided between the first magneticlayer and the first opposing magnetic layer, a first magnetization ofthe first magnetic layer being aligned with a first length direction, afirst stacking direction from the first magnetic layer toward the firstopposing magnetic layer crossing the first length direction; a firstinterconnect, at least a portion of the first interconnect extendingalong the first length direction, a first interconnect cross directioncrossing the first length direction, the first interconnect crossdirection being from the first sensor element toward the at least aportion of the first interconnect; a first circuit; a second circuit;and a third circuit a first electrical resistance of the first sensorelement changing according to an alternating current flowing in thefirst interconnect and a sensed magnetic field applied to the firstsensor element, the first circuit electrically being connected to thefirst sensor element, the first circuit supplying a first current to thefirst sensor element, the first current flowing through a first currentpath including the first magnetic layer, the first nonmagnetic layer,and the first opposing magnetic layer; the second circuit beingelectrically connected to the first interconnect, the second circuitsupplying a second current to the first interconnect, the second currentbeing alternating current; and the third circuit being configured tosense the change of the first electrical resistance.
 17. The sensoraccording to claim 16, wherein the second current has a first frequency,and the third circuit senses an alternating current signal having afrequency in a range including the first frequency.
 18. The sensoraccording to claim 16, wherein the second current has a first frequency,and the third circuit includes: a filter, a signal corresponding to thefirst electrical resistance being input to the filter, the filterattenuating a signal of a frequency of 2 times the first frequency ormore; and a lock-in amplifier, an output of the filter being input tothe lock-in amplifier.